Automated photo processing systems for the manufacture of semiconductor devices (chips); wafer index stations; stepper interface modules; and photo resist processors, namely hot plate ovens for heating a silicon wafer, chill plates for cooling a silicon wafer, photo resist coaters, and photo resist developers

'autom':1 'chill':31 'chip':11 'coater':40 'cool':34 'develop':44 'devic':10 'heat':27 'hot':23 'index':13 'interfac':16 'manufactur':7 'modul':17 'name':22 'oven':25 'photo':2,19,38,42 'plate':24,32 'process':3 'processor':21 'resist':20,39,43 'semiconductor':9 'silicon':29,36 'station':14 'stepper':15 'system':4 'wafer':12,30,37

200 APS

Owner

Goods & Services