Artificial intelligence- and machine learning-enabled recorded computer software supporting platforms for big data for use in fully automated and self-learning manufacture, fabrication, processing, cleaning, polishing, diagnostics, support, and maintenance of semiconductors, semiconductor wafers, integrated circuits, and substrates incorporating semiconductors

'artifici':1 'autom':20 'big':14 'circuit':39 'clean':28 'comput':9 'data':15 'diagnost':30 'enabl':7 'fabric':26 'fulli':19 'incorpor':42 'integr':38 'intellig':2 'learn':6,24 'learning-en':5 'machin':4 'mainten':33 'manufactur':25 'platform':12 'polish':29 'process':27 'record':8 'self':23 'self-learn':22 'semiconductor':35,36,43 'softwar':10 'substrat':41 'support':11,31 'use':17 'wafer':37

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