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Inspection, metrology, and lithography equipment for semiconductor manufacturing, in the nature of instruments and devices, namely, optical inspection systems and optical metrology systems comprising a light source and one or more optical cameras or sensors in communication with computer software and hardware that sense and/or capture images of semiconductor and electronic related components, primarily semiconductor wafers, semiconductor die, packaged integrated circuits, printed circuit boards, liquid crystal displays, electronic displays, and disk storage media, and automatically inspect these images for information such as defects, coordinate or position determination, identification, and/or presence or absence of a feature, characteristic or substance thereon; computer software for analysis and visualization of process, metrology, inspection, test, and design data pertaining to semiconductor manufacturing