ACTRANS DAIHEN CLEAN ROBOT

Owners

Goods & Services

[ Work loading and unloading handling robots for metalworking machine tools; ] Wafer transfer robots for semiconductor manufacturing machines and systems; Robots for transferring glass substrates for liquid crystal; [ Cutting machines for metalworking; Cargo handling machine and apparatus; Microwave generators used for semiconductor manufacturing machines and systems; ] Semiconductor manufacturing machines, namely, apparatus for placing semiconductor wafers in desired position during processing of the semiconductor wafers [ ; Semiconductor manufacturing systems, comprised of equipment front end module (EFEM) in the nature of semiconductor manufacturing machines; Semiconductor manufacturing systems, comprised of electro-mechanical transporters for semiconductor wafers in the nature of semiconductor manufacturing machines ]

[ Power supply units used for semiconductor manufacturing machines and systems; Matching units that transmit power from a power source to a plasma process chamber, namely, impedance conversion electrical circuits for radio frequency power used for semiconductor manufacturing machines and systems; Semiconductor manufacturing machines and systems, comprised of radio frequency electrical power source units, radio frequency electrical controls and radio frequency electrical circuits for application in manufacturing and controlling processes in the manufacture of thin films and semiconductors ]