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An automated system for drying, leak detection, particle and water measurement of ampoules, containers and vessels used for specialty chemicals and high purity gases; an automated system for drying measuring and certifying the dryness, particle release rate, differential pressure and leak rate of ampoules, containers and vessels

Automated system comprising valves, mechanisms for opening and closing valves, and detection systems of containers for the purpose of transport, dispensing and delivery of chemicals, gases of chemicals and high purity gases used for manufacturing electronic devices and components, semiconductors, namely, silicon and compound semiconductors, flat panel displays, namely, thin film transistor-liquid crystal displays; data collection, retrieval and analytical systems, namely, computer software and electronic control systems for the purpose of processing analytical data used in preparation of containers used for transport, dispensing and delivery of chemicals, gases of chemicals and high purity gases used for manufacturing electronic devices and components, semiconductors, namely, silicon and compound semiconductors, flat panel displays, namely, thin film transistor-liquid crystal displays; light emitting diodes, photovoltaics, microelectromechanical and other electronic components, namely, integrated circuits, optoelectronics, bioelectronics, biomedical electronic devices, electronics in microfluidics and nanofluidics systems, and nanotechnology and sub-nanotechnology devices; an automated and programmable system comprising valve opening and closing mechanisms and leak detection system; water and particle detection systems; an automated system for measuring and certifying correct operation of valves on ampoules, containers and vessels by measuring flow conductance, torque and twist angle