chemical reagent supply, vaporization and delivery apparatus for carrying out chemical vapor deposition for manufacture of semiconductors and superconductors

'apparatus':7 'carri':9 'chemic':1,11 'deliveri':6 'deposit':13 'manufactur':15 'reagent':2 'semiconductor':17 'superconductor':19 'suppli':3 'vapor':4,12

technical support services, namely, adaptation, construction, installation, maintenance, and deinstallation of chemical reagent source, vaporization and delivery apparatus for chemical vapor deposition applications

'adapt':5 'apparatus':18 'applic':23 'chemic':12,20 'construct':6 'deinstal':10 'deliveri':17 'deposit':22 'instal':7 'mainten':8 'name':4 'reagent':13 'servic':3 'sourc':14 'support':2 'technic':1 'vapor':15,21

chemicals, substrates, and coating for use in the manufacture of semiconductors and superconductors

'chemic':1 'coat':4 'manufactur':9 'semiconductor':11 'substrat':2 'superconductor':13 'use':6

ADVANCED TECHNOLOGY MATERIALS

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