Electro-mechanical systems for use in the field of semiconductor wafer fabrication primarily comprised of computer software for the manufacture of semiconductor wafers, and also comprising heat pumps and process chillers to provide temperature controlled fluids for such fabrication

'also':26 'chiller':32 'compris':15,27 'comput':17 'control':36 'electro':2 'electro-mechan':1 'fabric':13,40 'field':9 'fluid':37 'heat':28 'manufactur':21 'mechan':3 'primarili':14 'process':31 'provid':34 'pump':29 'semiconductor':11,23 'softwar':18 'system':4 'temperatur':35 'use':6 'wafer':12,24

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