Parts of mechanical vacuum coating installations in the nature of devices for cathode sputtering in the reactive and metallic mode, namely, cathodes and vacuum chambers

'cathod':13,22 'chamber':25 'coat':5 'devic':11 'instal':6 'mechan':3 'metal':19 'mode':20 'name':21 'natur':9 'part':1 'reactiv':17 'sputter':14 'vacuum':4,24

Structural parts and replacement parts of mechanical vacuum coating installations in the nature of machines for cathode sputtering in the reactive and metallic mode, namely, cathodes and vacuum chambers; and, electrical machines for carrying out a sputter process which uses cathode sputtering to apply coating and layers of coating consisting of metals, metal-oxides, metal-nitrides, metal-carbides and metallic alloys

'alloy':64 'appli':44 'carbid':61 'carri':34 'cathod':17,26,41 'chamber':29 'coat':9,45,49 'consist':50 'electr':31 'instal':10 'layer':47 'machin':15,32 'mechan':7 'metal':23,52,54,57,60,63 'metal-carbid':59 'metal-nitrid':56 'metal-oxid':53 'mode':24 'name':25 'natur':13 'nitrid':58 'oxid':55 'part':2,5 'process':38 'reactiv':21 'replac':4 'sputter':18,37,42 'structur':1 'use':40 'vacuum':8,28

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