Substrate inspection systems, comprising computer hardware and associated software for measurement of substrates, namely, semiconductor wafers, to determine wafer flatness, shape, thickness Bow Wrap and SORI, resistivity, conductivity and notch detection

'associ':8 'bow':23 'compris':4 'comput':5 'conduct':28 'detect':31 'determin':18 'flat':20 'hardwar':6 'inspect':2 'measur':11 'name':14 'notch':30 'resist':27 'semiconductor':15 'shape':21 'softwar':9 'sori':26 'substrat':1,13 'system':3 'thick':22 'wafer':16,19 'wrap':24

AFS-300

Owners

Goods & Services