Machines and machine tools for atomic scale layer deposition; atomic scale layer deposition machines

'atom':6,10 'deposit':9,13 'layer':8,12 'machin':1,3,14 'scale':7,11 'tool':4

Data processing equipment; computers and computer programmes for controlling and monitoring atomic scale layer deposition apparatus

'apparatus':16 'atom':12 'comput':4,6 'control':9 'data':1 'deposit':15 'equip':3 'layer':14 'monitor':11 'process':2 'programm':7 'scale':13

Treatment and coating of materials by atomic scale layer deposition method and consulting connected thereto

'atom':7 'coat':3 'connect':14 'consult':13 'deposit':10 'layer':9 'materi':5 'method':11 'scale':8 'thereto':15 'treatment':1

AGILE ALD

Owners