PARTICLE ACCELERATORS AND RELATED ACCESSORY EQUIPMENT-NAMELY, DRIFT TUBES, ELECTROSTATIC QUADRUPOLES, CONTROLLABLE SLIT ASSEMBLIES, ANALYZING AND SWITCHING MAGNETS, ELECTROSTATIC X-Y BEAM SCANNING SYSTEMS, PORTABLE AND NON-PORTABLE NEUTRON GENERATOR SYSTEMS, ION IMPLANTATION SYSTEMS, ACCELERATOR SYSTEMS, ELECTRON ACCELERATORS, BEAM PROFILE MONITORS, WAFER PROCESSING CHAMBERS, TARGET CHAMBERS, AND ION SOURCES

'acceler':2,38,41 'accessori':5 'analyz':16 'assembl':15 'beam':24,42 'chamber':47,49 'control':13 'drift':9 'electron':40 'electrostat':11,20 'equip':7 'equipment-nam':6 'generat':33 'implant':36 'ion':35,51 'magnet':19 'monitor':44 'name':8 'neutron':32 'non':30 'non-port':29 'particl':1 'portabl':27,31 'process':46 'profil':43 'quadrupol':12 'relat':4 'scan':25 'slit':14 'sourc':52 'switch':18 'system':26,34,37,39 'target':48 'tube':10 'wafer':45 'x':22 'x-i':21 'y':23

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