Plasma etching machines for use in manufacturing semiconductors; semiconductor manufacturing machines; semiconductor wafer processing equipment; semiconductor substrate manufacturing machines; apparatus for use in the manufacture of semiconductor devices and integrated circuits, namely, etching machines and plasma processing machines

'apparatus':20 'circuit':31 'devic':28 'equip':15 'etch':2,33 'integr':30 'machin':3,11,19,34,38 'manufactur':7,10,18,25 'name':32 'plasma':1,36 'process':14,37 'semiconductor':8,9,12,16,27 'substrat':17 'use':5,22 'wafer':13

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