ALIGNMENT WAFER

Owner

Goods & Services

Apparatus and instruments for physics, namely, process monitoring wafers, in-situ process monitoring wafers for detecting and measuring the offset between a wafer and a chuck, wafer edge-mounted optical sensors for monitoring and correcting wafer placement, wafers for providing output data to improve alignment and placement of wafers in semiconductor manufacturing tools, optical sensor-equipped wafers for process control and alignment verification; Diagnostic equipment for research laboratory use, namely, process monitoring wafers, in-situ process monitoring wafers for detecting and measuring the offset between a wafer and a chuck, wafer edge-mounted optical sensors for monitoring and correcting wafer placement, wafers for providing output data to improve alignment and placement of wafers in semiconductor manufacturing tools, optical sensor-equipped wafers for process control and alignment verification; Optical instruments, namely, process monitoring wafers, in-situ process monitoring wafers for detecting and measuring the offset between a wafer and a chuck, wafer edge-mounted optical sensors for monitoring and correcting wafer placement, wafers for providing output data to improve alignment and placement of wafers in semiconductor manufacturing tools, optical sensor-equipped wafers for process control and alignment verification