Machinery controllers in the nature of wafer inspection sensors for use in the manufacturing of semiconductors

'control':2 'inspect':8 'machineri':1 'manufactur':14 'natur':5 'semiconductor':16 'sensor':9 'use':11 'wafer':7

Machinery for manufacturing semiconductors; and machinery controllers in the nature of laser-based mask writers for manufacturing semiconductors

'base':14 'control':7 'laser':13 'laser-bas':12 'machineri':1,6 'manufactur':3,18 'mask':15 'natur':10 'semiconductor':4,19 'writer':16

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