Semiconductor wafer processing equipment, namely, epitaxial reactor, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, and operating software, all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers

'chemic':8 'deposit':10,14 'disc':35 'epitaxi':6 'equip':4 'etcher':17 'film':33 'implant':19 'ion':18 'name':5 'oper':21 'physic':12 'plasma':16 'process':3,26 'product':28 'reactor':7,11,15 'semiconductor':1,30 'silicon':34 'softwar':22 'substrat':31 'thin':32 'vapor':9,13 'wafer':2,37

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