Semiconductor devices; Semiconductors; Very large scale integration (VLSI) semiconductor integrated circuits

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Insulating and protective interlayer dielectric materials and coatings for use in integrated circuits, semiconductor devices, computer disk drives and other computer hardware; Insulating film for use in the manufacture of semiconductors

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Chemical source material for the deposition of thin films upon semiconductor wafers for the manufacture of semiconductors

'chemic':1 'deposit':6 'film':9 'manufactur':15 'materi':3 'semiconductor':11,17 'sourc':2 'thin':8 'upon':10 'wafer':12

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