Downloadable computer software for controlling semiconductor manufacturing processes; downloadable computer software used for process control and yield management in semiconductor, integrated circuit and related microelectronics manufacturing industries; downloadable computer software used for testing and inspecting physical characteristics and electrical characteristics of semiconductor, integrated circuit and microelectronics; downloadable computer software for computer management machines for monitoring and warning about operation of semiconductor manufacturing machines; downloadable computer software for controlling and programing semiconductor inspection machines

'characterist':37,40 'circuit':22,44 'comput':2,10,29,48,51,65 'control':5,15,68 'download':1,9,28,47,64 'electr':39 'industri':27 'inspect':35,72 'integr':21,43 'machin':53,63,73 'manag':18,52 'manufactur':7,26,62 'microelectron':25,46 'monitor':55 'oper':59 'physic':36 'process':8,14 'program':70 'relat':24 'semiconductor':6,20,42,61,71 'softwar':3,11,30,49,66 'test':33 'use':12,31 'warn':57 'yield':17

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