sputtering systems; namely, thin film making sputterers, surface cleaning sputterers, and etching sputterers for microprocessing; [ electrical and optical components; namely, liquid crystal displays, magnetic discs, optical discs, magnetic optical discs, resistors, semiconductor lasers, magnetic heads, solar cells, and sensors; ] gas analyzers, and vacuum gauges

'analyz':41 'cell':37 'clean':9 'compon':19 'crystal':22 'disc':25,27,30 'display':23 'electr':16 'etch':12 'film':5 'gas':40 'gaug':44 'head':35 'laser':33 'liquid':21 'magnet':24,28,34 'make':6 'microprocess':15 'name':3,20 'optic':18,26,29 'resistor':31 'semiconductor':32 'sensor':39 'solar':36 'sputter':1,7,10,13 'surfac':8 'system':2 'thin':4 'vacuum':43

vacuum apparatus for manufacturing semiconductor devices; namely, multi-chamber chemical vapor depositions; and vacuum pumps

'apparatus':2 'chamber':10 'chemic':11 'deposit':13 'devic':6 'manufactur':4 'multi':9 'multi-chamb':8 'name':7 'pump':16 'semiconductor':5 'vacuum':1,15 'vapor':12

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