Semiconductor wafer processing equipment, operational software, and components, namely-- epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, and chemical mechanical polishers; all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers

'chemic':12,25 'compon':8 'deposit':14,18 'disc':40 'epitaxi':10 'equip':4 'etcher':21 'film':38 'implant':23 'ion':22 'mechan':26 'name':9 'oper':5 'physic':16 'plasma':20 'polish':27 'process':3,31 'product':33 'reactor':11,15,19 'semiconductor':1,35 'silicon':39 'softwar':6 'substrat':36 'thin':37 'vapor':13,17 'wafer':2,42

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