lubricants for industrial and scientific purposes; oils, greases, waxes and oil-, grease-, or wax-based compounds used as lubricants and sealants in vacuum systems; waxes used in the manufacture of semiconductors as a mounting media and as a protective coating during etching processes; general purpose greases; laboratory and industrial vapor diffusion pump oils; diffusion-ejector pump oils

'base':16 'coat':41 'compound':17 'diffus':52,56 'diffusion-ejector':55 'ejector':57 'etch':43 'general':45 'greas':8,12,47 'industri':3,50 'laboratori':48 'lubric':1,20 'manufactur':30 'media':36 'mount':35 'oil':7,11,54,59 'process':44 'protect':40 'pump':53,58 'purpos':6,46 'scientif':5 'sealant':22 'semiconductor':32 'system':25 'use':18,27 'vacuum':24 'vapor':51 'wax':9,15,26 'wax-bas':14

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