Automated pattern profile monitoring system for semiconductor wafers, comprising a microscope, image processor, LED illumination system for microscope comprising light emitting diodes (LEDs), mirrors, and lenses, electric display panel, HEPA filter, wafer loader, structures semiconductor wafer, and host personal computer, all sold as a unit

'autom':1 'compris':9,19 'comput':40 'diod':22 'display':28 'electr':27 'emit':21 'filter':31 'hepa':30 'host':38 'illumin':15 'imag':12 'led':14,23 'lens':26 'light':20 'loader':33 'microscop':11,18 'mirror':24 'monitor':4 'panel':29 'pattern':2 'person':39 'processor':13 'profil':3 'semiconductor':7,35 'sold':42 'structur':34 'system':5,16 'unit':45 'wafer':8,32,36

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