semiconductor wafer processing equipment; namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, support frames, and parts thereof

'chemic':8 'deposit':10,14 'epitaxi':6 'equip':4 'etcher':17 'frame':21 'implant':19 'ion':18 'name':5 'part':23 'physic':12 'plasma':16 'process':3 'reactor':7,11,15 'semiconductor':1 'support':20 'thereof':24 'vapor':9,13 'wafer':2

manufacturing machines for thin film processing in the production of thin film transistors and other electronic products, and parts and accessories thereof; and manufacturing machines for liquid crystal displays for use in electronic products, and parts thereof

'accessori':21 'crystal':28 'display':29 'electron':16,33 'film':5,12 'liquid':27 'machin':2,25 'manufactur':1,24 'part':19,36 'process':6 'product':9,17,34 'thereof':22,37 'thin':4,11 'transistor':13 'use':31

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