Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded software for automating and controlling machines that manufacture semiconductors and flat panel displays, and computer memory hardware containing the foregoing recorded software; diagnostic equipment, namely, optical inspection apparatus for the inspection, review, and measurement of semiconductor elements in the nature of wafers, reticles, and flat panel displays; recorded operational software for the inspection, review, and measurement of semiconductor elements in the nature of wafers, reticles, and flat panel displays

'apparatus':40 'autom':15 'comput':27 'contain':30 'control':3,17 'diagnost':35 'display':25,59,81 'element':49,71 'equip':36 'flat':23,57,79 'forego':32 'hardwar':29 'industri':10 'inspect':39,43,65 'machin':18 'manufactur':9,20 'measur':46,68 'memori':28 'name':11,37 'natur':52,74 'oper':61 'optic':38 'panel':24,58,80 'record':12,33,60 'reticl':55,77 'review':44,66 'semiconductor':8,21,48,70 'softwar':2,13,34,62 'software-control':1 'system':4 'use':5 'wafer':54,76

Semiconductor manufacturing machines; machines for manufacturing and processing of displays and touch panels

'display':10 'machin':3,4 'manufactur':2,6 'panel':13 'process':8 'semiconductor':1 'touch':12

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