Pollution control machines for the treatment and abatement of process gases, fumes, effluents, and liquids in the field of semiconductor wafer fabrication

'abat':8 'control':2 'effluent':13 'fabric':22 'field':18 'fume':12 'gase':11 'liquid':15 'machin':3 'pollut':1 'process':10 'semiconductor':20 'treatment':6 'wafer':21

Maintenance, repair and installation of pollution control machines and equipment for the treatment of gases, liquids and other waste from semiconductor manufacturing processes

'control':7 'equip':10 'gase':15 'instal':4 'liquid':16 'machin':8 'mainten':1 'manufactur':22 'pollut':6 'process':23 'repair':2 'semiconductor':21 'treatment':13 'wast':19

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