Semiconductor substrate polishing machine and components parts, namely, a wafer polisher and tribometer, a wafer scrubber and tribometer, and a slurry injection system comprised of a molded injector body that delivers slurry onto the wafer, and molded mounting hardware to mount the injector body to the wafer polisher, for a wafer polisher sold together as a unit

'bodi':29,44 'compon':6 'compris':24 'deliv':31 'hardwar':39 'inject':22 'injector':28,43 'machin':4 'mold':27,37 'mount':38,41 'name':8 'onto':33 'part':7 'polish':3,11,48,52 'scrubber':16 'semiconductor':1 'slurri':21,32 'sold':53 'substrat':2 'system':23 'togeth':54 'tribomet':13,18 'unit':57 'wafer':10,15,35,47,51

Testing the functionality of semiconductor processing equipment, namely, analytical and functional testing of polishing pads, diamond discs, cleaning solutions, additives, and retaining rings

'addit':20 'analyt':9 'clean':18 'diamond':16 'disc':17 'equip':7 'function':3,11 'name':8 'pad':15 'polish':14 'process':6 'retain':22 'ring':23 'semiconductor':5 'solut':19 'test':1,12

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