machines for coating work pieces, especially flat, disk-shaped substrates of organic, mineral of metallic materials with wear resistant, electronically conductive, electrically insulating, and optically active coatings, as well as the structural parts in the nature of sputtering and/or plasma sources for coating the machined workpieces

'activ':27 'and/or':40 'coat':3,28,44 'conduct':22 'disk':9 'disk-shap':8 'electr':23 'electron':21 'especi':6 'flat':7 'insul':24 'machin':1,46 'materi':17 'metal':16 'miner':14 'natur':37 'optic':26 'organ':13 'part':34 'piec':5 'plasma':41 'resist':20 'shape':10 'sourc':42 'sputter':39 'structur':33 'substrat':11 'wear':19 'well':30 'work':4 'workpiec':47

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