electron emitting device consisting of a dense array of electron emitters constituting a massively parallel electron beam source, used in (1) semiconductor lithography equipment which, in turn, is used to make semiconductors and (2) metrology applications

'1':21 '2':34 'applic':36 'array':8 'beam':17 'consist':4 'constitut':12 'dens':7 'devic':3 'electron':1,10,16 'emit':2 'emitt':11 'equip':24 'lithographi':23 'make':31 'massiv':14 'metrolog':35 'parallel':15 'semiconductor':22,32 'sourc':18 'turn':27 'use':19,29

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