Sensors and probes and parts thereof for non-optical microscopes and near-field optical microscopes; micromechanical and microelectrical instruments and apparatus for surface and equipment characteristics detection; sensors and probes and parts thereof for high-power scanning microscopy, scanning probe microscopy and scanning electron microscopy; sensors comprising micromechanical slides and membranes; scanning instruments and sensors and parts thereof for determining and measuring surfaces and equipment characteristics

'apparatus':23 'characterist':28,69 'compris':50 'detect':29 'determin':63 'electron':47 'equip':27,68 'field':15 'high':38 'high-pow':37 'instrument':21,56 'measur':65 'membran':54 'microelectr':20 'micromechan':18,51 'microscop':11,17 'microscopi':41,44,48 'near':14 'near-field':13 'non':9 'non-opt':8 'optic':10,16 'part':5,34,60 'power':39 'probe':3,32,43 'scan':40,42,46,55 'sensor':1,30,49,58 'slide':52 'surfac':25,66 'thereof':6,35,61

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