Electronic instruments for use in inspection and measurement of industrial components, namely, an automated substrate metrology device comprised of a robotic handler, automated positioning system, and optics system, all for use in determining the critical dimensions, profiles, film thickness, and composition of patterned and un-patterned films and structures used in the fabrication of integrated circuits and semiconductors

'autom':14,23 'circuit':57 'compon':11 'composit':41 'compris':18 'critic':35 'determin':33 'devic':17 'dimens':36 'electron':1 'fabric':54 'film':38,48 'handler':22 'industri':10 'inspect':6 'instrument':2 'integr':56 'measur':8 'metrolog':16 'name':12 'optic':27 'pattern':43,47 'posit':24 'profil':37 'robot':21 'semiconductor':59 'structur':50 'substrat':15 'system':25,28 'thick':39 'un':46 'un-pattern':45 'use':4,31,51

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