Computer software; computer software algorithms for semiconductor metrology and inspection; computer software for performing measurements of critical dimensions, and feature registration of semiconductor wafers and structures; computer software for use in optical and electron beam metrology systems; computer software provided as part of an integrated software suite for semiconductor manufacturing process control and analysis.

'algorithm':5 'analysi':54 'beam':35 'comput':1,3,11,27,38 'control':52 'critic':17 'dimens':18 'electron':34 'featur':20 'inspect':10 'integr':45 'manufactur':50 'measur':15 'metrolog':8,36 'optic':32 'part':42 'perform':14 'process':51 'provid':40 'registr':21 'semiconductor':7,23,49 'softwar':2,4,12,28,39,46 'structur':26 'suit':47 'system':37 'use':30 'wafer':24

ASTROALIGN

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