Metrology equipment that employs polarized, normal incidence spectroscopic ellipsometry for linewidth profile and critical dimensions, spectroscopic reflectometry for films and film stacks, ultraviolet (UV) and deep UV spectroscopic ellipsometry for ultra-thin films and film characterization, diffraction-based overlay and film stress/bow measurement

'base':40 'character':37 'critic':14 'deep':26 'diffract':39 'diffraction-bas':38 'dimens':15 'ellipsometri':9,29 'employ':4 'equip':2 'film':19,21,34,36,43 'incid':7 'linewidth':11 'measur':45 'metrolog':1 'normal':6 'overlay':41 'polar':5 'profil':12 'reflectometri':17 'spectroscop':8,16,28 'stack':22 'stress/bow':44 'thin':33 'ultra':32 'ultra-thin':31 'ultraviolet':23 'uv':24,27

ATLAS

Owners

Goods & Services