U.S. federal trademark · Serial No. 90864557 · Reg. No. UK00003330534
Apparatus and instruments for thin film processing, namely, thin film processing machines; apparatus and instruments for thin film processing, namely, power operated atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, and atomic layer epitaxy; power operated etch tools for atomic layer etching and power operated cluster tools for etching; apparatus and instruments for thin film processing, namely, power operated atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, and atomic layer epitaxy; power operated etch tools for atomic layer etching and power operated cluster tools for etching with automated handling
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