AUTOMATION FOUP

Owners

Goods & Services

Apparatus and instruments for physics, namely, automated front-opening unified pods (FOUPs) being a semiconductor wafer transportation and storage containers with integrated electronics for charging, data collection, and communication with semiconductor wafers during semiconductor manufacturing processes; Diagnostic equipment for research laboratory use, namely, FOUP-based wafer monitoring systems comprising electronic sensors for monitoring wafer position, measuring surface conditions and detecting defects during controlled experiments and tool qualification processes in semiconductor fabrication environments; FOUP-integrated systems, namely, data processing apparatus for acquisition, storage, and transmission of wafer environmental and performance data; Electronic positional and measurement sensors and communication modules for collecting and transmitting wafer-related data within semiconductor processing equipment; Recorded computer software for managing wafer data collection and FOUP operations; Downloadable computer software applications for monitoring wafer conditions and controlling FOUP charging and communication functions