Substrate inspection system, comprising non contact optical scanning equipment and associated software for inspecting semiconductor wafers and for detecting and classifying surface defects on wafers, namely, particles and scratches, polishing defects, crystal orientation defects, roughness, edge chips and cracks

'associ':11 'chip':37 'classifi':21 'compris':4 'contact':6 'crack':39 'crystal':32 'defect':23,31,34 'detect':19 'edg':36 'equip':9 'inspect':2,14 'name':26 'non':5 'optic':7 'orient':33 'particl':27 'polish':30 'rough':35 'scan':8 'scratch':29 'semiconductor':15 'softwar':12 'substrat':1 'surfac':22 'system':3 'wafer':16,25

AWIS-300

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