U.S. federal trademark · Serial No. 87896185 · Reg. No. 6228436
metrology system comprised of computer software and computer hardware for testing and characterizing physical properties of semiconductors and integrated circuits, namely, critical dimension and shape; instruments for testing, inspecting, and characterizing physical properties of semiconductors and integrated circuits; computer hardware and software used for testing, inspecting, and characterizing physical properties of semiconductors and integrated circuits; computer hardware and software used for monitoring and controlling semiconductor manufacturing processes; computer hardware and software used for providing feedback about device parameters to semiconductor and integrated circuit manufacturers
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