Chemicals for use in industry and science, namely, materials for micro process engineering; coating agent containing polymer as main component for integrated circuits processing and the manufacture of electronic parts and components; materials for forming fine pattern, namely, unprocessed polymers mixed with solvents; directed self-assembly materials, namely, unprocessed polymers mixed with solvents

'agent':15 'assembl':47 'chemic':1 'circuit':23 'coat':14 'compon':20,32 'contain':16 'direct':44 'electron':29 'engin':13 'fine':36 'form':35 'industri':5 'integr':22 'main':19 'manufactur':27 'materi':9,33,48 'micro':11 'mix':41,52 'name':8,38,49 'part':30 'pattern':37 'polym':17,40,51 'process':12,24 'scienc':7 'self':46 'self-assembl':45 'solvent':43,54 'unprocess':39,50 'use':3

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