Apparatus and instruments for materials characterization and sample manipulation inside electron and ion-beam microscopes, namely, microanalysis X-ray detectors, and data acquisition and analytical software for Energy Dispersive Spectroscopy (EDS) and Wavelength Dispersive Spectroscopy (WDS), and detectors and data acquisition and analytical software for Electron Backscatter Diffraction (EBSD) analysis

'acquisit':25,43 'analysi':52 'analyt':27,45 'apparatus':1 'backscatt':49 'beam':15 'character':6 'data':24,42 'detector':22,40 'diffract':50 'dispers':31,36 'ebsd':51 'ed':33 'electron':11,48 'energi':30 'insid':10 'instrument':3 'ion':14 'ion-beam':13 'manipul':9 'materi':5 'microanalysi':18 'microscop':16 'name':17 'ray':21 'sampl':8 'softwar':28,46 'spectroscopi':32,37 'wavelength':35 'wds':38 'x':20 'x-ray':19

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