Compressed gas handling systems, and components thereof, namely, metal cabinet enclosures for holding compressed gas cylinders, with integrated controls, flow regulating valves, and feed means for delivering specialized gases used in the manufacture of semiconductors

'cabinet':10 'compon':6 'compress':1,14 'control':19 'cylind':16 'deliv':27 'enclosur':11 'feed':24 'flow':20 'gas':2,15 'gase':29 'handl':3 'hold':13 'integr':18 'manufactur':33 'mean':25 'metal':9 'name':8 'regul':21 'semiconductor':35 'special':28 'system':4 'thereof':7 'use':30 'valv':22

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