Computer software for operating each of semiconductor wafer handling systems, semiconductor manufacturing machines, robotic systems and process control systems, controller, namely, computer hardware and operating software sold as a unit for controlling operation of robotic and process control systems

'comput':1,22 'control':18,20,32,38 'handl':9 'hardwar':23 'machin':13 'manufactur':12 'name':21 'oper':4,25,33 'process':17,37 'robot':14,35 'semiconductor':7,11 'softwar':2,26 'sold':27 'system':10,15,19,39 'unit':30 'wafer':8

Semiconductor manufacturing machines, semiconductor wafer handling systems in the nature of industrial robots and operating software sold as an integral component thereof

'compon':21 'handl':6 'industri':12 'integr':20 'machin':3 'manufactur':2 'natur':10 'oper':15 'robot':13 'semiconductor':1,4 'softwar':16 'sold':17 'system':7 'thereof':22 'wafer':5

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