U.S. federal trademark · Serial No. 76133927
MAINTENANCE AND REPAIR OF COMPUTER SOFTWARE
COMPUTER SOFTWARE FOR SEMICONDUCTOR WAFER PROCESSING EQUIPMENT USED IN THE PROCESSING AND PRODUCTION OF SEMICONDUCTOR SUBSTRATES, THIN FILMS, SILICON DISCS AND WAFERS; NAMELY, EPITAXIAL REACTORS, CHEMICAL VAPOR DEPOSITION REACTORS, PHYSICAL VAPOR DEPOSITION REACTORS, PLASMA ETCHERS, ION IMPLANTERS, AND CHEMICAL MECHANICAL POLISHERS
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