Cathodes incorporated in sputtering apparatus

'apparatus':5 'cathod':1 'incorpor':2 'sputter':4

Integrated circuit manufacturing machines; semi-conductor manufacturing machines; semi-conductor elements manufacturing machines; and sputtering systems composed of thin film making sputterers, surface cleaning sputterers, and etching sputterers for microprocessing

'circuit':2 'clean':26 'compos':19 'conductor':7,12 'element':13 'etch':29 'film':22 'integr':1 'machin':4,9,15 'make':23 'manufactur':3,8,14 'microprocess':32 'semi':6,11 'semi-conductor':5,10 'sputter':17,24,27,30 'surfac':25 'system':18 'thin':21

CAELA

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