Microelectronics and semiconductor manufacturing equipment used in processing and manufacturing substrates for the microelectronics and semiconductor industry, namely, silicon wafers, integrated circuits, semiconductors, semiconductor substrates and other microelectronic surfaces and devices

'circuit':22 'devic':31 'equip':5 'industri':17 'integr':21 'manufactur':4,10 'microelectron':1,14,28 'name':18 'process':8 'semiconductor':3,16,23,24 'silicon':19 'substrat':11,25 'surfac':29 'use':6 'wafer':20

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