U.S. federal trademark · Serial No. 87891021
Chamber hardware for precision surface processing (PSP) systems for semiconductor wafers comprised of wafer handling platform for precision surface processing (PSP) systems for semiconductor fabrication equipment, namely, wafer handling arms, wafer handling components, namely, wafer chucks and end-effectors, industrial robots and operating software sold as an integral component thereof, wafer aligners and wafer handling industrial robots for use in the field of semiconductor fabrication
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