U.S. federal trademark · Serial No. 76418013 · Reg. No. 30170291
Mechanical devices in the nature of manipulators, for handling or transport of semiconductor wafers
Plants and equipment for thermal processing or manufacturing methods, namely, diffusion furnaces, continuous furnaces, burn in kilns, vacuum soldering furnaces, coating furnaces, annealing furnaces, enameling furnaces, vacuum furnaces, plants for chemical vapor deposition (CVD-plants); systems for processing of semiconductor wafers in vacuum, namely diffusion furnaces, plants for chemical vapor deposition; systems for handling and cleaning of gases and exhaust gases, namely, gas purification plants
Hardware and software used to operate systems and devices for thermal processing, namely, diffusion furnaces, continuous furnaces, burn in kilns, vacuum soldering furnaces, coating furnaces, annealing furnaces, enameling ovens, vacuum furnaces, plants for chemical vapor deposition
Source: USPTO federal trademark records. Informational only, not legal advice. Status and details may lag the live USPTO database.