semiconductor wafer processing equipment and components, namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanter, semiconductor chemical mechanical polishers; and computer programs for use therewith

'chemic':10,23 'compon':6 'comput':27 'deposit':12,16 'epitaxi':8 'equip':4 'etcher':19 'implant':21 'ion':20 'mechan':24 'name':7 'physic':14 'plasma':18 'polish':25 'process':3 'program':28 'reactor':9,13,17 'semiconductor':1,22 'therewith':31 'use':30 'vapor':11,15 'wafer':2

repair and maintenance services for semiconductor wafer processing equipment and components for use therewith

'compon':11 'equip':9 'mainten':3 'process':8 'repair':1 'semiconductor':6 'servic':4 'therewith':14 'use':13 'wafer':7

CENTURA WXP

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