Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded software for automating and controlling machines that manufacture semiconductors and computer memory hardware containing the foregoing recorded software; recorded computer software for use with semiconductor wafer processing equipment for automating and controlling machines that manufacture semiconductor wafers

'autom':15,42 'comput':23,32 'contain':26 'control':3,17,44 'equip':40 'forego':28 'hardwar':25 'industri':10 'machin':18,45 'manufactur':9,20,47 'memori':24 'name':11 'process':39 'record':12,29,31 'semiconductor':8,21,37,48 'softwar':2,13,30,33 'software-control':1 'system':4 'use':5,35 'wafer':38,49

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