COMPUTER-BASED CHEMICAL CONTROLLING APPARATUS, NAMELY, COMPUTERS, PROGRAMMABLE LOGIC CONTROLLERS, COMPUTER DISKETTES, CD-ROMs AND SUPERVISORY CONTROL AND DATA ACQUISITION (SCADA) SOFTWARE FOR USE IN INTEGRATED CIRCUIT AND SEMICONDUCTOR FABRICATION

'acquisit':22 'apparatus':6 'base':3 'cd':15 'cd-rom':14 'chemic':4 'circuit':29 'comput':2,8,12 'computer-bas':1 'control':5,11,19 'data':21 'diskett':13 'fabric':32 'integr':28 'logic':10 'name':7 'programm':9 'rom':16 'scada':23 'semiconductor':31 'softwar':24 'supervisori':18 'use':26

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