chemical delivery device, namely, a cabinet containing a removable liquid chemical storage drum, liquid pumps, safety sensors, and programmable computerized controls, sold as a unit, and replacement parts therefor, for the controlled delivery of liquid chemicals in the semiconductor industry

'cabinet':6 'chemic':1,11,36 'computer':20 'contain':7 'control':21,32 'deliveri':2,33 'devic':3 'drum':13 'industri':40 'liquid':10,14,35 'name':4 'part':28 'programm':19 'pump':15 'remov':9 'replac':27 'safeti':16 'semiconductor':39 'sensor':17 'sold':22 'storag':12 'therefor':29 'unit':25

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