Electronic inspection apparatus consisting of and containing related computer processing and software components that are packaged together as a single functional apparatus unit for inspection, quality control and assurance, namely, rapid chemical metrology inspection, for material surface examination and processing

'apparatus':3,22 'assur':29 'chemic':32 'compon':13 'comput':9 'consist':4 'contain':7 'control':27 'electron':1 'examin':38 'function':21 'inspect':2,25,34 'materi':36 'metrolog':33 'name':30 'packag':16 'process':10,40 'qualiti':26 'rapid':31 'relat':8 'singl':20 'softwar':12 'surfac':37 'togeth':17 'unit':23

CHEMETRIQ

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