Computer hardware; computer software for use in process control and yield management for the semiconductor, integrated circuit and related microelectronics manufacturing industries; computer software for testing and inspecting physical and electrical properties of semiconductors, integrated circuits and microelectronics; computer software for providing analytic data on the performance of inspection and metrology tools; cluster tools, namely, electronic apparatus for semiconductor wafer shape metrology and wafer defect inspection

'analyt':43 'apparatus':57 'circuit':17,36 'cluster':53 'comput':1,3,23,39 'control':9 'data':44 'defect':65 'electr':31 'electron':56 'hardwar':2 'industri':22 'inspect':28,49,66 'integr':16,35 'manag':12 'manufactur':21 'metrolog':51,62 'microelectron':20,38 'name':55 'perform':47 'physic':29 'process':8 'properti':32 'provid':42 'relat':19 'semiconductor':15,34,59 'shape':61 'softwar':4,24,40 'test':26 'tool':52,54 'use':6 'wafer':60,64 'yield':11

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